Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071478 | Method of depositing tungsten film with reduced resistivity and improved surface morphology | Kai Wu, Averginos V. Gelatos | 2011-12-06 |
| 7964505 | Atomic layer deposition of tungsten materials | Madhu Moorthy, Avgerinog V. Gelatos, Kai Wu | 2011-06-21 |