Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D642605 | Lid assembly for a substrate processing chamber | Tetsuya Ishikawa, David H. Quach | 2011-08-02 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2011-07-12 |