Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002947 | Plasma treatment system and cleaning method of the same | Yoichiro Numasawa | 2011-08-23 |
| 7913752 | Cooling device for vacuum treatment device | Masashi Ueda, Shusaku Yamasaki, Kazuo Miyoshi, Hiroyuki Otsuka | 2011-03-29 |