Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8063458 | Micromechanical component, method for fabrication and use | Bernhard Loeffler | 2011-11-22 |
| 7923792 | MEMS sensor comprising a deformation-free back electrode | — | 2011-04-12 |
| 7898052 | Component with a semiconductor junction and method for the production thereof | Anton Prantl, Rainer Stowasser | 2011-03-01 |