Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947158 | Apparatus and method for removing bubbles from a process liquid | Helge Hartz, Axel Preusse | 2011-05-24 |
| 7899570 | Advanced automatic deposition profile targeting and control by applying advanced polish endpoint system feedback | Thomas Ortleb, Thomas Harold Roessler | 2011-03-01 |