Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039391 | Method of forming a contact in a semiconductor device with engineered plasma treatment profile of barrier metal layer | Jinsong Yin, Wen Yu, Connie P. Wang, Paul R. Besser | 2011-10-18 |