Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980922 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, Uwe Stoeckgen, John Lampett | 2011-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980922 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, Uwe Stoeckgen, John Lampett | 2011-07-19 |