Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007986 | Immersion lithography fluids | Peng Zhang, Gene Everad Parris, Leslie Barber | 2011-08-30 |
| 7879531 | Immersion lithography fluids | Peng Zhang, Gene Everad Parris, Leslie Barber | 2011-02-01 |