Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8009345 | Crystallization apparatus, crystallization method, device, and light modulation element | Yukio Taniguchi, Masakiyo Matsumura, Tomoya Kato, Takahiko Endo | 2011-08-30 |
| 7998841 | Method for dehydrogenation treatment and method for forming crystalline silicon film | Hajime Shirai | 2011-08-16 |
| 7897946 | Crystallization apparatus, crystallization method, device, and light modulation element | Yukio Taniguchi, Masakiyo Matsumura, Tomoya Kato, Takahiko Endo | 2011-03-01 |