Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8044375 | Apparatus and method for ion beam implantation using scanning and spot beams | — | 2011-10-25 |
| 8039821 | Ion implantation systems | — | 2011-10-18 |
| 7902527 | Apparatus and methods for ion beam implantation using ribbon and spot beams | Nicholas R. White | 2011-03-08 |