Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6684891 | Wafer cleaning | — | 2004-02-03 |
| 6681782 | Wafer cleaning | — | 2004-01-27 |
| 6679272 | Megasonic probe energy attenuator | Michael B. Olesen, Yi Wu | 2004-01-20 |
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6684891 | Wafer cleaning | — | 2004-02-03 |
| 6681782 | Wafer cleaning | — | 2004-01-27 |
| 6679272 | Megasonic probe energy attenuator | Michael B. Olesen, Yi Wu | 2004-01-20 |