Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830939 | System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra | Kenneth C. Harvey, Neal B. Gallagher, Barry M. Wise | 2004-12-14 |