SW

Steven R. Walther

VA Varian Semiconductor Equipment Associates: 2 patents #3 of 27Top 15%
📍 Saalfeld, MA: #1 of 1 inventorsTop 100%
Overall (2004): #40,002 of 270,089Top 15%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6716727 Methods and apparatus for plasma doping and ion implantation in an integrated processing system — 2004-04-06
6686598 Wafer clamping apparatus and method — 2004-02-03