Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6781139 | Load lock vacuum conductance limiting aperture | — | 2004-08-24 |
| 6690022 | Ion beam incidence angle and beam divergence monitor | Grant Kenji Larsen, Ashwin Purohit, Robert A. Poitras, Damian Brennan | 2004-02-10 |