Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803585 | Electron-cyclotron resonance type ion beam source for ion implanter | — | 2004-10-12 |
| 6791079 | Mass spectrometer based on the use of quadrupole lenses with angular gradient of the electrostatic field | — | 2004-09-14 |
| 6783629 | Plasma treatment apparatus with improved uniformity of treatment and method for improving uniformity of plasma treatment | — | 2004-08-31 |