Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798065 | Method and apparatus for high-resolution in-situ plasma etching of inorganic and metals films | Shao-Wen Hsia, Maureen R. Brongo | 2004-09-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798065 | Method and apparatus for high-resolution in-situ plasma etching of inorganic and metals films | Shao-Wen Hsia, Maureen R. Brongo | 2004-09-28 |