Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794292 | Extrusion-free wet cleaning process for copper-dual damascene structures | — | 2004-09-21 |
| 6780761 | Via-first dual damascene process | Ming-Hsing Liu, Hsiao-Pang Chou, Ching-Piao Lin, Pei-Jen Wang | 2004-08-24 |
| 6767825 | Etching process for forming damascene structure of the semiconductor | — | 2004-07-27 |
| 6733597 | Method of cleaning a dual damascene structure | Sun-Chieh Chien | 2004-05-11 |
| 6692580 | Method of cleaning a dual damascene structure | Sun-Chieh Chien | 2004-02-17 |