Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6749764 | Plasma processing comprising three rotational motions of an article being processed | Oleg Siniaguine, Patrick Halahan, Sam Kao | 2004-06-15 |
| 6693361 | Packaging of integrated circuits and vertical integration | Oleg Siniaguine | 2004-02-17 |