TY

Tomohiro Yoshimura

HE Hitachi Kokusai Electric: 1 patents #22 of 94Top 25%
Overall (2004): #95,502 of 270,089Top 40%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6790687 Substrate processing apparatus and semiconductor device producing method — 2004-09-14