Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6789250 | Pattern data generation system, method and program for pattern data generation, reticle fabricating method, and semiconductor device manufacturing method using the pattern data | Mitsuhiro Yano | 2004-09-07 |
| 6782344 | Method and apparatus for diagnosing abnormality and estimating degradation in valve apparatus | Haruo Ito, Tomoaki Sumita | 2004-08-24 |