Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768627 | Electrostatic chuck and processing apparatus for insulative substrate | Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Koh Fuwa, Ken MAEHIRA | 2004-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768627 | Electrostatic chuck and processing apparatus for insulative substrate | Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Koh Fuwa, Ken MAEHIRA | 2004-07-27 |