Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770165 | Apparatus for plasma treatment | — | 2004-08-03 |
| 6758222 | Processing method for substrate | Kaoru Mizutani, Atsushi Matsushita | 2004-07-06 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770165 | Apparatus for plasma treatment | — | 2004-08-03 |
| 6758222 | Processing method for substrate | Kaoru Mizutani, Atsushi Matsushita | 2004-07-06 |