Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815151 | Rinsing solution for lithography and method for processing substrate with the use of the same | Masahito Tanabe, Masakazu Kobayashi, Toshimasa Nakayama | 2004-11-09 |
| 6746963 | Method for processing coating film and method for manufacturing semiconductor element with use of the same method | Yasushi Fujii, Hiroyuki Iida, Isao Sato, Shigeru Yokoi | 2004-06-08 |
| 6734258 | Protective coating composition for dual damascene process | Etsuko Iguchi, Jun Koshiyama | 2004-05-11 |
| 6689535 | Anti-reflective coating composition, multilayer photoresist material using the same, and method for forming pattern | Etsuko Iguchi, Takeshi Tanaka | 2004-02-10 |