Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797068 | Film forming unit | Hideaki Yamasaki, Takashi Mochizuki, Susumu Arima | 2004-09-28 |
| 6793969 | Method of forming an oxidation-resistant TiSiN film | Yukihiro Shimogaki | 2004-09-21 |