Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819052 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Shigeru Kasai, Takashi Ogino | 2004-11-16 |