Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6756565 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Osamu Suenaga, Takenobu Matsuo | 2004-06-29 |
| 6740164 | Plating apparatus and method of manufacturing semiconductor device | Takenobu Matsuo | 2004-05-25 |
| 6716329 | Processing apparatus and processing system | Takenobu Matsuo | 2004-04-06 |