Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6748960 | Apparatus for supercritical processing of multiple workpieces | Maximilian A. Biberger, Frederick P. Layman | 2004-06-15 |
| 6736149 | Method and apparatus for supercritical processing of multiple workpieces | Maximilian A. Biberger, Frederick P. Layman | 2004-05-18 |
| 6722642 | High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism | Maximilan Biberger | 2004-04-20 |