TA

Takashi Akahori

TL Tokyo Electron Limited: 4 patents #11 of 414Top 3%
Overall (2004): #11,430 of 270,089Top 5%
4
Patents 2004

Issued Patents 2004

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
6767829 Plasma deposition method and system 2004-07-27
6737350 Method of manufacturing semiconductor device Kouichiro Inazawa, Kouji Senoo, Masaaki Hagiwara 2004-05-18
6727182 Process for the production of semiconductor device Shuichi Ishizuka, Shunichi Endo, Takeshi Aoki, Tadashi Hirata 2004-04-27
6720659 Semiconductor device having an adhesion layer 2004-04-13