Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805135 | Cleaning fluid and cleaning method for component of semiconductor-treating apparatus | Kenichi Hirota, Hitoshi Yamada, Kiyoshi Yuasa, Eiji Yamaguchi, Shinichi Kawaguchi +1 more | 2004-10-19 |
| 6716477 | Method and apparatus for monitoring process exhaust gas, semiconductor-manufacturing device and method and system for managing semiconductor-manufacturing device | Kiyoshi Komiyama, Hiroshi Nishikawa | 2004-04-06 |