TH

Takaaki Hirooka

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #106,935 of 270,089Top 40%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6700089 Plasma processing device, its maintenance method, and its installation method 2004-03-02