Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830774 | Coating method | Hirofumi Ookuma, Kouichi Suefuji | 2004-12-14 |
| 6790283 | Coating apparatus | Hirofumi Ookuma, Kouichi Suefuji | 2004-09-14 |
| 6756980 | Imaging simulation method and imaging simulation system using the same and recording medium programmed with the simulation method | — | 2004-06-29 |
| 6752872 | Coating unit and coating method | Hiroichi Inada | 2004-06-22 |
| 6672779 | Substrate processing apparatus and substrate processing method | Issei Ueda, Naruaki Iida, Yuji Matsuyama, Yoichi Deguchi | 2004-01-06 |