Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823816 | Plasma processing system | Yasuyoshi Yasaka | 2004-11-30 |
| 6796268 | Microwave plasma processing system | — | 2004-09-28 |
| 6713968 | Plasma processing apparatus | Yasuyoshi Yasaka | 2004-03-30 |
| 6695948 | Plasma processing apparatus | Yasuyoshi Yasaka | 2004-02-24 |