MY

Moyuru Yasuhara

TL Tokyo Electron Limited: 3 patents #24 of 414Top 6%
Overall (2004): #23,209 of 270,089Top 9%
3
Patents 2004

Issued Patents 2004

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6803548 Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus Wenling Wang, Koichi Sakamoto, Fujio Suzuki, Sunil Shah, Pradeep Pandey +1 more 2004-10-12
6787377 Determining method of thermal processing condition Wenling Wang, Koichi Sakamoto, Fujio Suzuki 2004-09-07
6730885 Batch type heat treatment system, method for controlling same, and heat treatment method Fujio Suzuki, Wenling Wang, Koichi Sakamoto, Sunil Shah, Pradeep Pandey 2004-05-04