Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723202 | Worktable device and plasma processing apparatus for semiconductor process | Toshifumi Nagaiwa, Shuei Sekizawa, Jun Ooyabu | 2004-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723202 | Worktable device and plasma processing apparatus for semiconductor process | Toshifumi Nagaiwa, Shuei Sekizawa, Jun Ooyabu | 2004-04-20 |