Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777967 | Inspection method and inspection apparatus | Shinji Iino, Tadatomo Suga, Toshihiro Itoh, Kenichi Kataoka | 2004-08-17 |
| 6774621 | Inspection stage having a plurality of Z axes | — | 2004-08-10 |
| 6707310 | Needle load measuring method, needle load setting method and needle load detecting mechanism | — | 2004-03-16 |
| 6672876 | Probe card with pyramid shaped thin film contacts | — | 2004-01-06 |