KU

Kinya Ueno

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #174,671 of 270,089Top 65%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6746543 Apparatus for and method of cleaning objects to be processed Yuji Kamikawa, Satoshi Nakashima 2004-06-08