Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730239 | Cleaning agent for semiconductor device & method of fabricating semiconductor device | Naoki Yokoi, Hiroshi Morita, Naoki Ichiki, Hideaki Nezu, Masayuki Takashima | 2004-05-04 |
| 6713232 | Method of manufacturing semiconductor device with improved removal of resist residues | Seiji Muranaka, Mami Shirota, Junji Kondo | 2004-03-30 |
| 6708903 | Two-fluid cleaning jet nozzle, cleaning equipment and method of fabricating semiconductor device employing the same | — | 2004-03-23 |