Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806211 | Device and method for processing substrate | Koji Homma | 2004-10-19 |
| 6800139 | Film deposition apparatus and method | Kenji Matsumoto | 2004-10-05 |
| 6756235 | Metal oxide film formation method and apparatus | Yijun Liu, Takashi Magara | 2004-06-29 |