Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824825 | Method for depositing metallic nitride series thin film | — | 2004-11-30 |
| 6817381 | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus | Yutaka Miura | 2004-11-16 |