Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821566 | Method and apparatus for forming insulating film containing silicon oxy-nitride | Yoshihide Tada, Masayuki Imai, Asami Suemura, Shingo Hishiya | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821566 | Method and apparatus for forming insulating film containing silicon oxy-nitride | Yoshihide Tada, Masayuki Imai, Asami Suemura, Shingo Hishiya | 2004-11-23 |