Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764575 | Magnetron plasma processing apparatus | Tomomi Yamasaki, Hidetoshi Kimura, Junichi Arami, Hiroo Ono, Koji Miyata | 2004-07-20 |
| 6733624 | Apparatus for holding an object to be processed | Shinji Himori | 2004-05-11 |