Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829057 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Jon Opsal | 2004-12-07 |
| 6813034 | Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements | Jon Opsal | 2004-11-02 |
| 6781692 | Method of monitoring the fabrication of thin film layers forming a DWDM filter | — | 2004-08-24 |
| 6774997 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Jon Opsal | 2004-08-10 |
| 6754305 | Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry | Jon Opsal | 2004-06-22 |
| 6714300 | Optical inspection equipment for semiconductor wafers with precleaning | Lanhua Wei | 2004-03-30 |
| 6678349 | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements | Jon Opsal | 2004-01-13 |