Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780496 | Optimized capping layers for EUV multilayers | James A. Folta, Eberhard A. Spiller | 2004-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780496 | Optimized capping layers for EUV multilayers | James A. Folta, Eberhard A. Spiller | 2004-08-24 |