Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787187 | Micromechanical device fabrication | — | 2004-09-07 |
| 6746886 | MEMS device with controlled gas space chemistry | Walter M. Duncan, Michael R. Douglass, Richard O. Gale | 2004-06-08 |