Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6686283 | Shallow trench isolation planarization using self aligned isotropic etch | John E. Campbell, Somit Joshi, James B. Friedmann, Michael J. McGranaghan, Janice D. Makos +8 more | 2004-02-03 |