Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753037 | Re-coating MEMS devices using dissolved resins | Vincent C. Lopes, Michael Brenner | 2004-06-22 |
| 6737225 | Method of undercutting micro-mechanical device with super-critical carbon dioxide | — | 2004-05-18 |