Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812126 | Method for fabricating a semiconductor chip interconnect | Ajit Paranjpe, Randhir Bubber, Lino Velo | 2004-11-02 |
| 6753272 | High-performance energy transfer method for thermal processing applications | Yong Jin Lee, Jalil Kamali, Sergey Belikov | 2004-06-22 |
| 6705394 | Rapid cycle chuck for low-pressure processing | Xiangqun Chen, Shiyuan Cheng, Cecil J. Davis | 2004-03-16 |
| 6692575 | Apparatus for supporting a substrate in a reaction chamber | Thomas R. Omstead, Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks | 2004-02-17 |