Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6682635 | Cathodic sputtering chamber for applying material to the surface of a semiconductor wafer located therein | Reinhard Hanzlik, Frank Mueller, Stefan Fries, Helmut Endl | 2004-01-27 |