Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825538 | Semiconductor device using an insulating layer having a seed layer | Martin M. Frank, Yves Chabal | 2004-11-30 |
| 6821835 | Chemical vapor deposition of silicate high dielectric constant materials | — | 2004-11-23 |
| 6797525 | Fabrication process for a semiconductor device having a metal oxide dielectric material with a high dielectric constant, annealed with a buffered anneal process | Martin L. Green | 2004-09-28 |
| 6770536 | Process for semiconductor device fabrication in which a insulating layer is formed on a semiconductor substrate | Peide Ye | 2004-08-03 |
| 6734068 | Method to form silicates as high dielectric constant materials | — | 2004-05-11 |
| 6730977 | Lower temperature method for forming high quality silicon-nitrogen dielectrics | John Mark Anthony, Yi Wei, Robert M. Wallace | 2004-05-04 |
| 6723581 | Semiconductor device having a high-K gate dielectric and method of manufacture thereof | Yves Chabal, Martin L. Green | 2004-04-20 |