Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6802368 | Temperature control system for a workpiece chuck | Paul Getchel, Henry A. Lyden | 2004-10-12 |
| 6700099 | Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces | William Stone, Douglas S. Olsen | 2004-03-02 |